Spray Pyrolysis: Metal-Oxide Thin Films Without Vacuum

At a glance. A precursor solution is sprayed onto a hot substrate, where it decomposes into an oxide film. The Tech Inc. Spray Pyrolysis Coating Unit programs nozzle motion, flow and substrate temperature.

Settings that control the film

• Substrate temperature.

• Droplet size (pneumatic or ultrasonic nozzle).

• Flow rate and number of passes.

• Nozzle height and speed.

Uses

Transparent conductive oxides, solar cell layers, gas sensors, ceramic membrane layers and catalysts.

Frequently asked questions

How hot? Up to 500 °C.

Ultrasonic nozzle? Available for finer droplets.

Ask mail@techincresearch.com for configuration.